Abstract：In order to ensure that the land leveling blasting will never be a threat to the Intel company lithography platform operation，the acceleration power spectrum density control indexes for engineering blasting were studied. Based on the analysis of multiple project cases，the acceleration spectrum density control index was turned into the control of blasting vibration velocity，and the vibration peak velocity of 0.05 cm/s was forecasted. Considering the engineering cost，the deep-hole blasting method could be used in some areas. After blasting experiment，when the Ms–6，Ms–7，Ms–8 sections of the nonel tube detonators was used in the holes，and Ms–4，Ms–5 sections of the nonel tube detonators on the surface，the blasting vibration peak velocity was not greater than 0.02 cm/s. At this time，the lithography platforms were working properly. It showed that transition from the acceleration power spectrum density control to the control of the blasting vibration velocity index is feasible. This transformation could provide a blasting scheme design reference with the presence of precision instruments.
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2016, Vol. 35 
